In an effort to reduce the cost-of-test (COT), a number of customers are increasing the parallelism of logic wafer probe cards. However, due to the complexity such as pitch and number of probes, the pricing for these cards is reaching astronomical levels. We do not believe this trend is sustainable, let alone logical. The presentation suggested examples of alternative solutions. It is clear that critical solutions need to be optimized at the test cell, factory, and supply chain level not just at the consumable (probe card) level.
For the last fifteen years the International Technology Roadmap for Semiconductors (ITRS) has been looking fifteen years into the future. Based upon technology requirements and other inputs, ranging from the gate size of transistors to advanced packaging technology, the Test and Test Equipment Technical Working Group (Test TWG) has worked to develop the requirements for test technology and equipment.
The Test TWG is over seventy volunteers with deep technical expertise in test from around the world and from every sized company – Fortune 100 to individual consultants – and every type of company – semiconductor independent device manufacturer (IDM), fabless semiconductor, foundry, outsourced assembly and test (OSAT), automated test equipment (ATE) suppliers, prober, probe card, socket, handler, and more. Through Continue reading “IEEE Semiconductor Wafer Test Workshop 2014 Presentation”
Integrated circuits using 2.5D advanced packaging are shipping. 3D packaging with thru-silicon vias (TSV) has been demonstrated. “5.5D” packages may not be far behind. Probe card suppliers have made progress building interconnect technology for the micro-bump arrays. Standards committees have started defining IC interface standards and test access protocols.
But what does the Test Engineer and Management really want? What can they afford? What are the most likely scenarios? Factors that determine which test technology can support the desired test flow are examined. In particular, probe card technology for probing TSV bumps and potential usage models are reviewed.
Rob Marcelis (BE Precision Technology ‐ The Netherlands), “H3D Profiler for Contact Less Probe‐Card Inspection”:
Probe cards require inspection since they are consumables subject to wear. Changes in probe position or shape can damage the semiconductor devices they are testing. As probe cards increase in size and probe count, the probe cards themselves are becoming more expensive to test in terms of test time and complexity. Each new test system typically requires an expensive “motherboard” for the probe card metrology tool to simulate the mechanics of the tester and provide electrical interconnect to the card for electrical testing.
Jose Horas (Intel Mobile Communications ‐ Germany), “28nm Mobile SoC Copper Pillar Probing Study”:
Intel Mobile Communications (IMC, previously Infineon Wireless) has started to switch from tin-silver (SnAg) solder bumps to copper pillars (CuP) with SnAg caps for attaching their die to packages. Since the bumps and pillars are formed on the wafer prior to testing of the devices the wafer probe process must accommodate both. CuP offer several advantages over SnAg bumps: tighter pitch (now at 120 µm and able to scale smaller versus 150 µm for SnAg bumps), lower substrate costs due to relaxed design rules, and lower assembly costs (easier to under fill).
As the number of probes on probe cards increase due to greater parallelism, driven by the desire for one touchdown testing and the future transition to 450 mm wafers, the total force required to probe a wafer increases if there is no reduction in the force per probe. This wafer prober chuck needs to apply the required force by pushing the wafer against the probe card typically held in place by the structure of the prober. With 200K probes on a 450 mm wafer each requiring 5 gF this is approximately equal to 1 ton (2205 lbF) of applied force. To reduce these force requirements wafer chuck and prober structure, Advantest and JEM have Continue reading “IEEE Semiconductor Wafer Test Workshop 2012 – Session 5 (Tuesday)”
Larry Levy (FormFactor, Inc.), “Is Parametric Testing About To Enter a Period of Growth and Innovation?”:
Upwards of one thousand facilities perform parametric wafer testing (based on 2009 market data) with over a third of these using obsolete test equipment. There have been no really new testers in several years – Agilent still has their 40xx series and Keithley has their S530 tester. And several companies have exited the market and some companies (including Keithley) are no longer supporting older models of testers. Since parametric testing remains an essential process, this has forced a high number of these facilities to use obsolete equipment or find other approaches. A few companies are going as far as using an Advantest 93000, a significantly more expensive and highly sophisticated digital tester, for parametric test. [Updated to clarify Keithley’s status.]
Tommie Berry (FormFactor, Inc.), “Actual vs. Programmed Over Travel for Advanced Probe Cards”:
As the number of probes on a probe card increase, the total force required to compress these probes – know as probe force – is increasing. With high force the actual over travel (AOT) – also know as overdrive – of the probe is often significantly different than the programmed over travel (POT) programmed in the prober. Even though memory test engineers with very high probe count cards have Continue reading “IEEE Semiconductor Wafer Test Workshop 2012 – Session 2 (Monday)”
This year’s IEEESemiconductor Wafer Test Workshop started on Sunday June 10th with a pleasant surprise. Due to a welcomed but unexpected wave of seventy walk-in registrations, there was insufficient seating at the opening dinner. Thankfully the hotel staff quickly adjusted to accommodate these additional guests. Attendance and interest in this year’s workshop was clearly up.
Jerry Broz, general conference chair, welcomed everyone with a brief overview and presented prizes for the first annual golf tournament. We then quickly proceeded with business as Matt Nowak (Senior Director, Advanced Technology, Qualcomm CDMA Technologies) provided the keynote “Emerging High Density 3D Through Silicon Stacking (TSS) – What’s Next?” Mr. Nowak discussed the increased amount of hype within the 3D semiconductor packaging market in the last year with everyone announcing something. And Thru Silicon Vias (TSVs) technology has already been in high volume production for image sensors for several years now but at a significantly lower density than for 3D packaging.
I discussed lower cost solutions that appear counter-intuitive since they require increased technical and operational complexity. Challenges of testing MEMS devices while still on wafer (prior to packaging and singulation) were discussed along with a review of MEMS solutions at this year’s IEEESemiconductor Wafer Test Workshop.
With the proper skills, experience, and perspective it is possible to avoid “re-inventing the wheel” and to develop the best strategy to profitably introduce new technologies to high volume manufacturing.
Traditional burn-in systems hold multiple printed circuit boards (PCBs) with one or more devices in burn-in sockets to provide temporary electrical interconnect to a device under test (DUT). These PCBs and sockets are known as “burn-in boards”. And the systems in which they are loaded are “ovens” that permit temperature stressing, sometimes at both hot and cold temperatures, while stimuli are supplied to the chip. The purpose of “burning-in” a device is to screen for infant mortality in an accelerated manner.
Michael Huebner, FormFactor, “A Hot Topic: Current Carrying Capacity, Tip Melting and Arcing”:
Power consumption per dynamic random-access memory (DRAM) is increasing to as high as 400 mA or more under normal test conditions. At the same time the number of DRAMs being tested in parallel – and sharing the same power supply – is increasing. Therefore, the risk of current damage to probes is increasing.
Stevan Hunter, ON Semiconductor, “Use of Harsh Wafer Probing to Evaluate Various Bond Pad Structures”:
Recent product needs such as bond [pads] over active circuitry (BOAC), the use of copper (Cu) wire bonding, increased wafer probe touch downs (as many as 6 TDs), and the desire for greater device reliability has driven the need for more robust bond pads to survive wafer probing.
One method for checking for damage to the device from the probing process is via the “Cratering Test”. They etch off the top aluminum (Al) metallization layer of the pad to visually inspect for damage in the underlying titanium-nickel (TiN) barrier metal layer. If there is a problem they can spot a “crater” in the metal. They continue etching to remove the TiN layer to look for additional damage in the layer(s) below.
As the final presenter at this week’s IEEESemiconductor Wafer Test Workshop (SWTW), I outlined how critical it is to understand the true cost of a product’s architecture in “Probe Card Cost Drivers from Architecture to Zero Defects“. Without a proper understanding of these costs – especially for fully custom high technology products such as wafer test probe cards – it is impossible to maintain a sufficient gross margin. Gross margin is essential to maintain the health of a company and to fund the research & development required for innovation.
Yes, there were a few in the audience who appeared pleased since they are confident that their products are on the right path. There were others who may have been upset based upon their company’s direction. I would argue that a proper diagnosis – regardless of how disturbing – is essential to drive the proper cure.
There is plenty of opportunity in the test market and reasons for optimism. The key to long term prosperity is to really understand the fundamentals of the business and not be blinded by the technology.
I thank those who stayed for the entire conference and welcome your thoughts below. And I will be posting more about the conference (including my summaries) in the next few weeks.
Starting off something new is often challenging and difficult with many unknowns. Kudos to Nick Langston for creating the Silicon Valley Test Conference that was held last week. (November 8 & 9, 2010) It was the first test conference to actually take place in Silicon Valley. And yes there were some minor “bugs” like registration delays and a no-show by the audio visual contractor that should be solved in next year’s Rev 2.0. Even with a few rough edges, the quality of the presentations and the exhibitors shined through to make this a success.
Ellis Huang, MPI Corporation, “Novel Vertical Probe Card Solution for Multi-DUTs and RF Device on 3 GHz Applications”:
This project was done with UMC using MPI’s VPC vertical probe technology to test Bluetooth modules at 2.45 GHz.
In order to provide a 50 ohm signal as close to the device under test (DUT) as possible, they added dummy ground pins to the probe head around critical signal pins. Even though these signal pins already had adjacent ground pads that were probed on the device, these dummy pins (probes) were positioned closer to the signal pin thereby maintaining the 50 ohm impedance. The dummy pins are connected to other grounds via the copper flex circuit on the space transformer. Continue reading “IEEE Semiconductor Wafer Test Workshop – Challenges of RF Probing – Session Nine (Wednesday)”
Jay Thomas, Grund Technical Solutions, LLC., “Probe Cards with Modular Integrated Switching Matrices”:
For the last 30 years, most scribeline parametric testing has been approximately 85% Current-Voltage (I-V) testing and 15% Capacitance-Voltage (C-V) testing. For these types of tests a 10 MHz bandwidth switch matrix has been sufficient.
However, some of the larger fabs such as HP, IBM, and Intel have started performing pulsed Current-Voltage (PIV) and electrostatic discharge (ESD) testing. These customers started this type of testing about four years ago unknown to Agilent & Keithley (the two largest DC parametric tester suppliers). This PIV and ESD testing requires high frequency switch matrices with 1 GHz bandwidth. [For more about ESD testing please see Jay’s second presentation below in this session.] Continue reading “IEEE Semiconductor Wafer Test Workshop – Parametric / Scribeline Probing – Session Six (Tuesday)”
Gert Hohenwarter, GateWave Northern, Inc., “Hidden Performance Limiters in the Signal Path”:
For high frequency signals, designers typically pay attention to avoiding coupling to adjacent signal lines to prevent cross talk. However, they need to look at many other areas of the design including coupling to power or sense lines, signal impedance mismatch, resonances, and the power distribution/delivery system (PDS). Coupling and mismatch may lead to resonances which reduce the operating speed or reduce the switching margin. These areas may also increase crosstalk increasing noise levels and also reducing switching margin. In addition, problems in the PDS may also reduce operating speed or switching margin. Continue reading “IEEE Semiconductor Wafer Test Workshop – Signal Integrity – Session Five (Tuesday)”
Mark McLaren, Integrated Technology Corporation, “Metrology Solutions for Very Large Probe Cards”:
Over the past few years as the number of memory devices to be tested in parallel has increased so has the size of probe cards to support this multisite testing. A few years ago memory probe cards grew to 440 mm diameter and recently they increased to 480 mm diameter. Now a similar growth in size has been seen for non-memory applications. Even though the parallelism (number of devices to be tested at once) has increased (but not on the scale of memory parallelism), the size increases have been the result of pushing more testing from package test to wafer test. These additional tests have required more local test resources (circuitry close to the device being tested) which require more real estate on probe cards. Continue reading “IEEE Semiconductor Wafer Test Workshop – Standards and Methods – Session Four (Monday)”
The 20th annual IEEE Semiconductor Wafer Test Workshop (SWTW) started this evening. Rumor has it that attendance is over 240 this year which is a vast improvement over last year’s 160 or so attendees. At the peak the conference had almost hit 600. Things started off well with a reception where I had the chance to catch up with many industry friends and colleagues.