Rob Marcelis (BE Precision Technology ‐ The Netherlands), “H3D Profiler for Contact Less Probe‐Card Inspection”:
Probe cards require inspection since they are consumables subject to wear. Changes in probe position or shape can damage the semiconductor devices they are testing. As probe cards increase in size and probe count, the probe cards themselves are becoming more expensive to test in terms of test time and complexity. Each new test system typically requires an expensive “motherboard” for the probe card metrology tool to simulate the mechanics of the tester and provide electrical interconnect to the card for electrical testing.
Jose Horas (Intel Mobile Communications ‐ Germany), “28nm Mobile SoC Copper Pillar Probing Study”:
Intel Mobile Communications (IMC, previously Infineon Wireless) has started to switch from tin-silver (SnAg) solder bumps to copper pillars (CuP) with SnAg caps for attaching their die to packages. Since the bumps and pillars are formed on the wafer prior to testing of the devices the wafer probe process must accommodate both. CuP offer several advantages over SnAg bumps: tighter pitch (now at 120 µm and able to scale smaller versus 150 µm for SnAg bumps), lower substrate costs due to relaxed design rules, and lower assembly costs (easier to under fill).
As the number of probes on probe cards increase due to greater parallelism, driven by the desire for one touchdown testing and the future transition to 450 mm wafers, the total force required to probe a wafer increases if there is no reduction in the force per probe. This wafer prober chuck needs to apply the required force by pushing the wafer against the probe card typically held in place by the structure of the prober. With 200K probes on a 450 mm wafer each requiring 5 gF this is approximately equal to 1 ton (2205 lbF) of applied force. To reduce these force requirements wafer chuck and prober structure, Advantest and JEM have Continue reading “IEEE Semiconductor Wafer Test Workshop 2012 – Session 5 (Tuesday)”
Larry Levy (FormFactor, Inc.), “Is Parametric Testing About To Enter a Period of Growth and Innovation?”:
Upwards of one thousand facilities perform parametric wafer testing (based on 2009 market data) with over a third of these using obsolete test equipment. There have been no really new testers in several years – Agilent still has their 40xx series and Keithley has their S530 tester. And several companies have exited the market and some companies (including Keithley) are no longer supporting older models of testers. Since parametric testing remains an essential process, this has forced a high number of these facilities to use obsolete equipment or find other approaches. A few companies are going as far as using an Advantest 93000, a significantly more expensive and highly sophisticated digital tester, for parametric test. [Updated to clarify Keithley’s status.]